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Orbital Research Inc. (ORI) is developing a
MEMS-based high temperature pressure transducer technology for
diesel and turbine engine applications. ORI's high temperature
pressure transducer is based on a thin film strain gage configuration
using MEMS fabrication techniques and a highly sensitive, novel
material thin-film. These technologies combine synergistically
resulting in a unique, high temperature sensor with high sensitivity
at an affordable price. The transducer's high gage factor (sensitivity)
and high temperature capability is significantly greater than
competing technologies. These sensors have been demonstrated in
the harsh diesel engine environment.(>250,000 cycles)
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Micro
Devices Overview [PDF]
High
temperature pressure transducer
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In this product development endeavor, ORI
demonstrated the novel pressure sensor inside a heavyduty
class, Detroit Diesel Series 60 engine at the
University of Michigan, Automotive Research Center.
In situ test results confirmed excellent correlation
between the un-cooled ORI pressure sensor and an
adjacent water-cooled laboratory grade sensor. Most
noteworthy is the appreciable cost difference between
the low-cost ORI sensor and the laboratory grade sensor
(approximately $1000 per unit plus additional hardware
costs). The sensor has demonstrated dynamic pressure
capability of over 30 kHz.
Orbital Research Inc.'s pressure transducer has the following design targets:
- Pressure Ranges: 0-60, 0-1000, 0-3000, psi
- Operating Temperature: 400°C for Diesel Engines -
Can be tailored for higher operating
temperatures up to 600°C.
- Repeatability: 0.1% full scale
- Accuracy: 1% full scale
- Linearity: 1% full scale
- Proof Pressure: 150% full scale
- Burst Pressure: 200% full scale
- Electrical - Excitation: 10 Vdc @ 15 mA
Output: 50 mV full scale
- Wheatstone Bridge Design
- Gage Factor: 35 to 100
- Dynamic Frequency Response: >30 kHz
- Dimensions: 9 mm dia. or smaller
- Sensing element size: small as 0.5 x 0.5 mm
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